
Precision Nanometrology (English, Wei Gao)
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Specifications
| Publisher | Springer |
| Language | English |
| ISBN-13 | 9781849962537 |
| ISBN-10 | 1849962537 |
| Author | Wei Gao |
Product Description
About the Book
Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and d…
ISBN: 9781849962537
Book Insights
What You'll Learn
- ·In-depth exploration of topics covered in Precision Nanometrology
- ·Key concepts explained with clarity and practical examples
- ·Insights valuable for anyone studying or working in Springer
Who Should Read This
Students and professionals interested in Springer, as well as general readers looking to expand their knowledge.
Key Highlights
- ·Brand new physical book delivered across India
- ·15-day hassle-free return policy
Customer Reviews
My friend loved this book. This is what he commented:
How to measure circularity (roundness) and cylindricity of a work piece in nanoscale without the run-out errors of the spindle and the out-of-straightness errors of liner guides ? How to measure and construct the nanoedges within 100nm scale and the 3D profile of a single point diamond cutting tool used to fabricate the precision sinusoidal grid used in the precision motion control feedback? How to decide the most suitable threshold value to obtain binary images from which the real physical dime











