Plasma Processes for Semiconductor Fabrication (English, W. N. G. Hitchon | Haroon Ahmad | Michael Pepper)
by W. N. G. Hitchon | Haroon Ahmad | Michael Pepper
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About the Book
Plasma processing is a central technique in the fabrication of semiconductor devices. This self-contained book provides an up-to-date description of plasma etching and deposition in semiconductor fabrication. It presents the basic physics and chemistry of these processes, and shows how they can be accurately modeled. The author begins with an overview of plasma reactors and discusses the various models for understanding plasma processes. He then…
ISBN: 9780521018005
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